| 摘要 |
<p>Thermionic cathode (12) for a plasma ion source (10) has tungsten wire (64) advanced by wheels (56) from supply (50) to take-up spool (58). In chamber (48), the active cathode region (64) acts with anode (16) to supply electrons for ionizing a fuel gas so the ions are discharged from slit (18) for acceleration, separation and implantation.</p> |
