| 摘要 |
PURPOSE:To improve the sensitivity of a 1,2-quinone diazide type photoresist compsn. by contg. water soluble polyhydric alcohol. CONSTITUTION:The compsn. prepd. by dissolving (A) 100pts.wt. alkali soluble polymer (e.g.; a copolymer of alpha,beta-ethylenic unsaturated carboxylic acid and a monoolefin type unsaturated compd.) and (B) about 5-100pts.wt. 1,2-quinone diazide compd. (e.g.; 1,2-benzoquinone diazide sulfonate ester) in an org. solvent (e.g.; methyl Cellosolve acetate) is added with (C) about 0.1-15pts.wt. water soluble polyhydric alcohol (e.g.; ethylene glycol, neopentyl glycol) basing on 100pts.wt. solids in the compsn., whereby the positive type photoresist compsn. is obtained. |
