| 摘要 |
PURPOSE:To reduce the etching period and to prevent a sample from being made dirty, by arranging an intermediate electrode having a two-split structure in a bell-jar, etching the sample using a cathode and an anode, and carrying out secondary etching on the sample with the intermediate electrode interposed between the cathode and the anode. CONSTITUTION:The bell-jar is composed of the anode 3 and a vacuum bell-jar outer wall 1', and the intermediate electrode 7' with a two-split structure is supported through insulators 11 by movable operation rods 12 and is positioned in the bell-jar. The sample 4 is placed on the cathode 2, and the first etching is carried out by the anode 3 and the cathode 2. Then the intermediate electrode 7' is placed between the cathode 2 and the anode 3 by the movable operation rod 12, and the second etching is carried out to remove the damaged layer. Accordingly, the intermediate electrode 7' can be readily attached, and therefore the installing time can be reduced. |
