发明名称 VESSEL FOR SOURCE OF VAPORIZATION FOR VACUUM DEPOSITION
摘要 PURPOSE:To obtain a photosensitive body for electrophotograph whose characteristics are stable, by reducing gradually the horizontal cross sectional area of an evaporation source vessel, which contains an alloy made up of a plurality of elements having different vapor pressures, from the open side thereof to the bottom. CONSTITUTION:The evaporation source vessel 1 has parallel walls on the open side and a prism-like bottom having a triangular shape in cross section so that the horizontal cross sectional area is gradually reduced toward the bottom. For example, a selenium/tellurium alloy consisting of selenium and tellurium whose vapor pressures are different is charged in this vessel 1, and the vessel 1 is placed in a heat insulating cover 3 having an opening at the top. Then an electric current is passed to a heater 4 to heat a vapor deposition material 2 to allow it to evaporate thereby it is deposited for example on an Al pipe. Using this vessel 1, the range of scattering of the half attenuation exposure quantity can be narrowed, and the characteristics are stable.
申请公布号 JPS57200560(A) 申请公布日期 1982.12.08
申请号 JP19810085503 申请日期 1981.06.03
申请人 FUJI DENKI SEIZO KK 发明人 YAMAMOTO TERUO
分类号 B01J19/00;C23C14/24;G03G5/082 主分类号 B01J19/00
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