| 摘要 |
PURPOSE:To correct meandering without stopping operations by supporting one end of the shaft of a conveyance roller as rotatable and fitting an eccentric bearing cartridge to the other end of the shaft. CONSTITUTION:In a vacuum process chamber 1 of a flexible work object (not shown in the figure), one end side of a guide roller 18 guiding the work object is supported as rotatable by means of a spherical bearing 20 fixed to the process chamber 1, and the other end side is supported to an eccentric bearing cartridge 24 inserted into a side plate 21 by means of a spherical bearing 23. At this time, the center position A of the cartridge 24 is off-centered in relation to the center position B of the roller 18 so that the roller 18 is capable of moving in all directions. If the work object moves in zigzag, the cartridge 24 is rotated with an operation lever (not shown in the figure), and the roller 18 is moved toward the correct direction, then the cartridge 24 is rotated in the reverse direction, bringing the roller 18 to a fixed position. |
