| 摘要 |
PURPOSE:To automatically inspect junction state with high speed and high accuracy by a method wherein the maximum diameter of a ball section and the drift amount of the ball and pad from the central spot are obtained by an image pick-up signal under bright field lighting after detecting the pad completed wire junction by the image pick-up signal under bright field lighting. CONSTITUTION:The image pick-up signal of a pellet is fed to an information processing device through a camera under bright field lighting and a pad 5 is detected by collating with a standard pattern S. At that time, the size of the pad and center C1 are calculated. Next, the pad is pictured under bright field lighting and the distance C1X1 can be obtained from a variation in signal level between the D and the center C1 by supposing spot D on the pad 5. The pad is rotated by a predetermined angle in the circumference direction of a ball section 9 with spot C1 as the central figure and the distance C1X2 is also obtained by detecting spot X2 on a collar 9b from a variation in signal level between EC1. The maximum diameter of the ball section 9 and the center C2 are obtained in the same way. The shift amount can be known by comparing the centers C1, C2 and the quality of wire junction can be decided by the shift amount and the size of the ball section 9. |
