| 摘要 |
PURPOSE:To make electrochemical measurement with high sensitivity and good responsiveness by integrating and forming all of working electrodes arranged with many working electrodes having fine pores, a reference electrode and a counter electrode on a substrate. CONSTITUTION:The very small electrode cell formed by integrating the many working electrodes 4 formed of a metal or semiconductor or semimetal, the counter electrode 5, and the reference electrode 6 on the substrate 1 is formed with the thin film of the metal, semiconductor or metal and insulating film successively on the substrate 1 the surface or entire part of which has an insulating characteristic. The insulating film of the uppermost layer is thereafter etched to open the many fine pores and to expose the metal part, by which the working electrodes 4 are formed. The patterns of the reference electrode 6 of the metal, semiconductor or semimetal and the counter electrode are formed by a lift off method on the insulating film remaining without being etched. The reference electrode 6 is obtd. by coating the same with an oxidation- reduction material. |
