发明名称 MEASURING DEVICE FOR PHOTO LUMINESCENCE INTENSITY
摘要 PURPOSE:To enable rapid finding of a value which performs a correction of a thickness of a sample without breakdown of the sample, by finding an amount of light absorbed to the sample from a difference between incident light to the sample and a transmission light strength. CONSTITUTION:A sample 6 is irradiated with light, emitted from an exciting light source 1, through a photo chopper 3. On the way, a part of the light is led to a photo detector 5 for measuring an incident light intensity through the working of a mirror 8. A photo detector 8 for measuring transmission light is located below the sample 6. Filters 4 and 7 remove visible light to attenuate exciting light entering the photo detector to an appropriate intensity. The produced photo luminescence and a part of exciting light reflected by the sample surface is collected by a lens 9 and is led to a photo detector 11. A part of the exciting light reflected by the sample surface is removed by a filter 10 located this side of the photo detector 11. The outputs of the photo detectors 5, 8, and 11 are connected to computing circuits 15 and 16 through lock-in amplifiers 12- 14, respectively to record the results in a recorder 17.
申请公布号 JPS57196136(A) 申请公布日期 1982.12.02
申请号 JP19810081601 申请日期 1981.05.28
申请人 FUJITSU KK 发明人 YAMAGUCHI AKIO
分类号 G01N21/64 主分类号 G01N21/64
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