| 摘要 |
<p>PURPOSE:To improve the characteristic of a capacitor, and to facilitate manufacture and to reduce the cost of a hybrid integrated circuit by a method wherein alpha-Ta is used as the capactitor constituting member of the hybrid integrated circuit, and Pd is interposed between conductors of Ti and Au for electrodes. CONSTITUTION:The alpha-Ta layer 2 is provided on a partially glazed ceramic substrate 1, a part thereof is anodically oxidized to form a dielectric layer 3, and a nichrome alloy layer 4 is provided selectively on the surface thereof to constitute the capacitor. A Ta3N5 layer 5, the Ti layer 6, the Pd layer 7, and the Au layer 8 are laminated in order on the whole surface, the laminated layers thereof are removed selctively to form the resistance element part, and then the heat treatment is performed. Accordingly the characteristic of the capacitor part of the hybrid integrated circuit can be improved, and moreover because use of the precious metal can be reduced, the cost can be reduced, and moreover because the anodic oxidation process can be reduced to one time, the process is simplified.</p> |
