发明名称 TREATMENT OF TUBULAR BODY WITH TOP
摘要 PURPOSE:To enable rapid and sure rinsing of a tubular body with a top by putting the tubular body in a tank wherein a liquid is held and by treating the body in a state that the inside thereof is nearly filled up with another body. CONSTITUTION:A coil cover 10, which is a tubular body with a top, is mounted, with a top board part 17 downward, on the stands 24 provided at the bottom part of a treatment tank 23, while an etching liquid 25 is filled up, with its level lower than the upper end of the coil cover 10, and a flexible film 27 is fitted to the lower surface of a cover body 26. The flexible film 27 and the cover body 26 form a space part 28, while the treatment tank 23, the cover body 26, the flexible film 27 and the upper surface of the etching liquid 25 form a space part 29, and air 31 is led into the space part 28, whereby the tubular part 18 of the coil cover 10 is filled up with the flexible film 27. With this, the level of the etching liquid 25 rises and the whole of the coil cover is sunk in the etching liquid. Therefore, the treatment can be performed with a small quantity of etching liquid and rinsing can be conducted simply even when the size of diameter of the cover 10 is changed.
申请公布号 JPS57196524(A) 申请公布日期 1982.12.02
申请号 JP19810081540 申请日期 1981.05.28
申请人 SHIN NIPPON DENKI KK 发明人 YONEZAWA KEISHIROU
分类号 B08B3/10;C30B19/00;H01L21/205 主分类号 B08B3/10
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