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发明名称
VERFAHREN UND VORRICHTUNG ZUM REINIGEN VON HALBLEITERPLAETTCHEN
摘要
申请公布号
DE3217891(A1)
申请公布日期
1982.12.02
申请号
DE19823217891
申请日期
1982.05.12
申请人
GCA CORP.
发明人
M. LAWSON,ROBERT
分类号
B08B3/12;C30B33/00;H01L21/304;(IPC1-7):B08B3/12;H01L21/30;H01L21/46
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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