| 摘要 |
PURPOSE:To provide a high-precise device which is easy to manufacture and has a high mass productivity, by a method wherein a bottom plate of a cylinder with a bottom forms a pressure sensitive part, and an insulating film is formed directly on the surface of the pressure sensitive part. CONSTITUTION:A bottom plate of a cylinder with a bottom, bringing a pressure of fluid to be measured into an action on the inside, forms a pressure sensitive part, an insulating film is formed directly on the surface of the pressure-sensitive part, and a strain guage resistor pattern is formed directly thereon with a metal film. For example, a bottom plate of a cylinder 1 with a bottom forms a thin and elastically deformable pressure sensitive part 3, and an insulating film 2, made of insulating resin, is formed over an approximately total area. Two resistance patterns R1, R2 are placed at a central part where the maximum tensile strain of the pressure sensitive part is produced, and remaining two resistance patterns R3, R4 are situated at a peripheral part where a maximum pressure strain is produced. The resistance patterns are connected in the order of R1- R4-R3-R1 through a lead pattern. |
