VERFAHREN UND VORRICHTUNG ZUM DOTIEREN VON HALBLEITERMATERIAL,申请号DE19813118785-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUM DOTIEREN VON HALBLEITERMATERIAL
摘要
申请公布号	DE3118785(A1)	申请公布日期	1982.12.02
申请号	DE19813118785	申请日期	1981.05.12
申请人	SIEMENS AG	发明人	HOERSCHELMANN,KONSTANTIN,DIPL.-PHYS.;KAUSCHE,HELMOLD,DIPL.-PHYS.;SPAETH,WERNER,DIPL.-PHYS.
分类号	H01L21/22;C30B31/16;C30B31/22;H01L21/223;H01L21/265;(IPC1-7):C30B31/22;H01L21/24;H01L21/26;H01L31/04;H01L31/18;H05H1/46	主分类号	H01L21/22
代理机构		代理人
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