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发明名称
VORRICHTUNG ZUM ERHITZEN VON ABDECKUEBERZUEGEN AUF HALBLEITERPLAETTCHEN
摘要
申请公布号
DE3217851(A1)
申请公布日期
1982.12.02
申请号
DE19823217851
申请日期
1982.05.12
申请人
GCA CORP.
发明人
JEROME WEBER,T.
分类号
G03F7/26;G03F7/40;H01L21/027;(IPC1-7):H01L21/31;H01L21/32;H01L21/68
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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