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发明名称
WASHER
摘要
申请公布号
JPS6380888(A)
申请公布日期
1988.04.11
申请号
JP19860224709
申请日期
1986.09.22
申请人
SPEEDFAM CO LTD
发明人
TSUCHIDA SHIGENORI
分类号
H01L21/304;B08B3/02;B65G49/02;G11B23/50;H01L21/677;H01L21/68
主分类号
H01L21/304
代理机构
代理人
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地址
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