发明名称 STELSEL OM NAUWKEURIG DOOR MIDDEL VAN TRANSLATIES EEN VOORWERP IN EEN VLAK TE PLAATSEN.
摘要 <p>The invention relates to a system for displacing an object supported on a carriage sliding above a bench, in such manner as to follow accurately a rectilinear trajectory. The lateral and rotational deviations of the object from the ideal trajectory are sensed by means of interferometer optical means which control a plurality of electromechanical transducers for cancelling out said deviations.</p>
申请公布号 NL170671(C) 申请公布日期 1982.12.01
申请号 NL19700017145 申请日期 1970.11.24
申请人 THOMSON-CSF, SOCIETE ANONYME TE PARIJS. 发明人
分类号 G01B9/02;G03F7/20;(IPC1-7):05D3/12;01B9/02 主分类号 G01B9/02
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