发明名称 HOUSING CASE FOR SUBSTRATE OF PHOTOMASK AND THE LIKE
摘要 <p>PROBLEM TO BE SOLVED: To provide a case for housing of substrates of photomasks, etc., which is capable of protecting the substrates against damage and contamination during transportation or at the time of storage and facilitates molding and washing. SOLUTION: The inside base of a case body 1 is integrally provided with supporting projections 4, 5 which allow the imposition of the substrates 10 (11) of the photomasks, etc., by bringing their peak ends into direct contact with the rear surfaces of the ends of the substrates 10 (11) and enclosing pieces 6, 7 which prohibit the movement in the transverse direction of the substrates 10 (11) by bringing their inside surfaces into contact with the peripheral edges of the substrates 10 (11) in the contour positions of the substrates 10 (11). The inside top surface of a cap 2 is integrally provided with retaining projections 8, 9 which prohibit the vertical oscillation by bringing the bottom ends into direct contact with the front surfaces of the substrates 10 (11) and holding the substrates 10 (11) together with the supporting projections 4, 5 in the respective positions facing the supporting projections 4, 5 of the case body 1. The case body 1 and the cap 2 are molded of plastic having the hardness lower than the hardness of the substrates 10 (11) of the photomasks, etc.</p>
申请公布号 JPH10142773(A) 申请公布日期 1998.05.29
申请号 JP19960315458 申请日期 1996.11.12
申请人 YUUKOU JUSHI KK 发明人 HAMADA TOSHIYUKI
分类号 B65D85/86;G03F1/66;H01L21/027;(IPC1-7):G03F1/14 主分类号 B65D85/86
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