发明名称 Method of making integrated circuits
摘要 A method of forming in a substrate of monocrystalline silicon semiconductor material having a major surface, a plurality of islands of silicon each including an active region of the substrate adjacent the major surface and surrounded by a body of silicon dioxide separating the islands from the substrate is described.
申请公布号 US4361600(A) 申请公布日期 1982.11.30
申请号 US19810320255 申请日期 1981.11.12
申请人 GENERAL ELECTRIC COMPANY 发明人 BROWN, DALE M.
分类号 H01L21/32;H01L21/762;(IPC1-7):H01L21/31;H01L21/76 主分类号 H01L21/32
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