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发明名称
METHOD FOR PLANARIZATION
摘要
申请公布号
KR0159388(B1)
申请公布日期
1999.02.01
申请号
KR19950033522
申请日期
1995.09.30
申请人
DAEWOO ELECTRONICS CO.,LTD
发明人
NOH, JAE-WOO
分类号
C25D7/12;G03F7/09;H01L21/302;H01L21/3065;H01L21/3205;H01L21/321;(IPC1-7):H01L21/31
主分类号
C25D7/12
代理机构
代理人
主权项
地址
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