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发明名称
ION GAUGE CONTROL APPARATUS OF ION IMPLANTER
摘要
申请公布号
KR0157913(B1)
申请公布日期
1999.02.01
申请号
KR19950044217
申请日期
1995.11.28
申请人
LG SEMICONDUCTOR CO., LTD.
发明人
PARK, SUK-MAN
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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