| 摘要 |
PURPOSE:To improve the efficiency and safety of working in wire bonding work by laser light by mounting a circular conical pipe of a laser light non-transmittable metal at the leading end of the laser light axis. CONSTITUTION:CO2 laser light is focused by a condenser lens 2 in an optical axis cylinder 1, and a wire (a) is bonded to a body (b) to be fixed by the focusing part thereof. In this case, a circular conical pipe 3 which is made of Ti, stainless steel or the like having non-transmittance to the CO2 laser light and is drawn to the shape of the focused laser beam is fixed to the leading end of the cylinder 1. A laser window 4 packed with a CO2 laser transmitting material such as Ge, Zn, Se or the like is formed at the leading end part 32 thereof whereby a grooved circular conical peak 5 by which a solder fillet C conforming to the shape of the bonding wire (a) is formed. The positioning of the wire (a) is easy and high safety is assured by the shielding of the laser light. |
