| 摘要 |
PURPOSE:To obtain a photoelectric converter having high sensitivity and excellent ohmic property by forming a photosensitive layer made of a photoconductive material on a transparent electrode layer formed on a transparent substrate, emitting a laser beam from the back surface of the substrate, and heat treating the photosensitive layer. CONSTITUTION:A transparent electrode layer 2 of NESA glass formed in a layer of approx. 0.2mum such as In2O3 is formed on a transparent substrate 1 made of Pyrex glass, quartz glass, crystal glass or the like of approx. 2mm. thick, and a photosensitive layer 3 made of CdS, ZnS or the like of approx. 5mum thick is covered on the layer 3. Then, a laser beam from a laser 4 is emitted toward the thicknesswise direction of a device from the side of the substrate 1 and the layer 2 while increasing the energy of the beam by a frequency converter 5 larger than the band gap energy of the photoconductive material forming the layer 3. In this manner, the beam is absorbed to the layer 3 without loss, it is heat treated at 400-600 deg.C, and ohmic property is maintained at the time of forming the layer. |
