| 摘要 |
PURPOSE:To enable to perform regulation of uniform electric discharge confirming operation of discharge, and moreover to enable to perform reregulation easily enabling to be used again even when ununiform electric discharge is generated by friction at a gas laser tube by a method wherein the equipping position of a bar type electrode to a package is made as variable. CONSTITUTION:The bar type electrode 3 is equipped to the package 1 by a constituted body consisting of screws 10 of plural number for regulation of position to enable to regulate insertion depth and the inclination of the electrode in the package 1 freely, a flange 11 to be inserted screws therein, and a flexible metal bellows 12. As a result, the electrode 3 is enabled to be regulated freely as to make the gap between a facing discharge electrode to be regulated in relation to the equipping face of package by the position regulating screws 10. Moreover the inclination in relation to the equipping face of package can be regulated freely, and correction of ununiformity of parallel discharge between the adjoining electrode can be attained. |
