| 摘要 |
PURPOSE:To make possible to open enough the flying passage for discharged particles in the titled apparatus without making a vacuum vessel large or complicated, by providing a shutter whose area can be varied between a fine particle discharge source and a base plate. CONSTITUTION:The area-variable shutter 2 capable of expanding to a fan shape is positined between the fine particle discharge source 17 and the target base plate 4 in the vacuum vessel 1. The single shutter 3 shown in dotted line is a conventional shutter. The particular shutter 2 involves a plurality of stacked shutter pieces 2' which have enough dimensions to cover the base plate 4 when they are expanded to a fan shape because one ends of the shutter pieces are pivotally supported by an expansion shaft 9 such that they can be expanded to a fan shape. By driving the shaft 9 through a suitable driving mechanism to allow the shutter pieces 2' to engage one another, they can be expanded to a fan shape or gathered to become a rectangle so that the amount of fine particles to be deposited on the base plate 4 can be effectively and arbitrarily controlled. |
