| 摘要 |
PURPOSE:To supply a source uniformly to wafers, and to treat a large number of the wafers by forming a large number of introducing ports for a reaction gas, mounting a polygonal cylindrical body of quartz into a quartz tube and setting up a mechanism turning the cylindrical body. CONSTITUTION:A polygonal cylinder 7 of quartz is installed into space surrounded by a quartz tube 1. Here, the positions of openings in the tubular longitudinal direction of each introducing port 2, 3, 4, 5 in the quartz tube 1 differ. A metal chloride is introduced from the introducing ports 2, 3, 4, 5, a gas for reduction is introduced from the introducing port 6 and the polygonal cylinder 7 is turned when forming the thin-film. Accordingly, the source can uniformly be supplied to the wafers W. |
