PROCESS FOR CONTINUOUSLY DEPOSITING A LAYER OF A SOLID MATERIAL ON THE SURFACE OF A SUBSTRATE HEATED TO A HIGH TEMPERATURE AND INSTALLATION FOR CARRYING OUT SAID PROCESS

摘要

By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600.degree.C which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two lateral curtains being constituted by another naturally gaseous reactant or reactant diluted in a gas. The gaseous products of the reaction issuing from the nozzle are compelled to flow above a predetermined region of the substrate and these products are evacuated by suction by means of channels disposed at the extremities of this region of the substrate and a pump to which the channels are connected.