| 摘要 |
PURPOSE:To form uniform films of the same quality on plural drums by applying electric fields between the plural drums provided in a single furnace and an electrode placed to face the side faces of the drums thereby forming the decomposted films of gaseous raw materials on the surfaces of the respective drums. CONSTITUTION:Films are formed by a capacity coupling type glow discharge film forming method on the surfaces of drums 2-1, 2-2, 2-3, 2-4, 2-5, 2-6 of a cylindrical shape disposed in a growing furnace of a cylindrical shape. At this time, a plurality of said drums are provided in the single furnace, and an electrode 2-7 of a cylindrical shape enclosing the drums is provided. The distances l1-l6 between the drums and the electrode 2-7 are set at l1=l2=l3=l4=l5= l6, and while the respective drums are rotated in arrows y1, y2, y3, y4, y5, y6 directions, glow discharge is generated between the drum surfaces and the electrode 2-7. Then, the gaseous raw materials existing between the drums and the electrode 2-7 are decomposed by the glow discharge and films are formed on the outside surfaces of the drums. |
