| 摘要 |
PURPOSE:To manage the size of a manufactured quartz oscillator strictly, by giving a monitor quartz oscillator in profile oxcillation in a quartz wafer and making etching so that this resonance frequency is a specific value. CONSTITUTION:In manufacturing a tuning fork type quartz oscillator with the photolithography method, each tuning fork is formed in a frame 13 in a quartz wafer in the state of linking and a monitor quartz oscillator 14 is formed. An AC electric field is given between gold vapor-deposited films at the upper and lower side of the quartz wafer and the monitor quartz oscillator is in profile oscillation, and the arm width W of the tuning fork is changed with etching, then the profile oscillation frequency can be changed. When the profile oscillation frequency reaches a specific value, the etching is finished. |
