| 摘要 |
PURPOSE:To form of uniform film quality and film thickness over the entire surfaces of a drum by disposing plural gas introduction ports and release ports alternately two dimensionally on the surface conforming to the drum surface and applying electric fields between the drum and the electrode while the drum is held still. CONSTITUTION:The gas f3 introduced through a gas introduction port 2-3 is released to the gas released ports 2-4, 2-6, 2-8 and 2-14, 2-12, 2-10 provided to an outside cylindrical electrode 2-2 along the drum surface. During this time, the gas f3 is decomposed by the glow discharge by the electric field applied between the drum 2-1 and the electrode 2-2, and a film is formed on the surface of the drum 2-1. While the gas f4 introduced through a gas introduction port 2-9 in the same manner is released to gas release ports 2-4, 2-6, 2-8 and 2-14, 2-12, 2-10, its film is formed by the glow discharge. The same holds true of the gas through gas introduction ports 2-5, 2-7, 2-11 2-13 and in the end the uniform films are formed on the outside surface of the drum 2-1. |
