| 摘要 |
PURPOSE:To remove the strain due to wax which is generated on a wafer by press-attaching a wafer onto a carrier plate and turning the wafer by a prescribed angle. CONSTITUTION:In the rotary mechanism 4 of a twisting machine, an installation plate 41 is installed in free revolution onto the upper edge of a stay 40 erected on a tilt table 2 so as to be positioned and stop at each prescribed position. The installation plate 41 is formed by cutting three parts on a disc at equal intervals, and a twisting machine 5 is installed at the cut part. The twisting machine 5 is equipped with a cylinder 51 installed onto the installation plate 41 through a bracket 50. Further, a cylinder 61 is rotatably connected between one of a plurality of holes drilled on a twisting arm 59 and a cylinder receiving tool 60 fixed onto the upper surface of a base plate 54. A pressing rotary mechanism 62 is arranged from a driving gear 58 to the lower position, penetrating through the basic plate 54. |
