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发明名称
POSITIVE-WORKING RADIATION-SENSITIVE COMPOSITION
摘要
申请公布号
EP0042562(A3)
申请公布日期
1982.11.17
申请号
EP19810104570
申请日期
1981.06.13
申请人
HOECHST AKTIENGESELLSCHAFT
发明人
RUCKERT, HANS, DR.;BUHR, GERHARD, DR.;STEPPAN, HARTMUT, DR.
分类号
G03C1/72;C08L33/00;C08L33/02;C08L61/00;C08L61/04;C08L61/06;C08L75/00;C08L75/04;G03C1/74;G03C5/00;G03F7/004;G03F7/039;G03F7/16;H01L21/027;H01L21/30;H05K3/00;(IPC1-7):G03C1/72;G03F7/26
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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