发明名称 |
A lithographic process resulting in positive images. |
摘要 |
<p>The solubility of phenol-formaldehyde resins to developers is significantly affected by the composition of the resin, the exposure dose, and the post exposure treatment that is employed. It has been found that the solubility of the exposed portions of the resin is significantly increased by controlling these parameters so that after exposure reaction with oxygen rather than crosslinking is enhanced.</p> |
申请公布号 |
EP0064926(A1) |
申请公布日期 |
1982.11.17 |
申请号 |
EP19820400835 |
申请日期 |
1982.05.06 |
申请人 |
WESTERN ELECTRIC COMPANY, INCORPORATED |
发明人 |
FAHRENHOLTZ, SUSAN ROSENO |
分类号 |
H01L21/027;G03F7/38;(IPC1-7):03F7/10;01L21/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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