发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device of a chip size package structure, in which sealing resin is formed on both faces of a semiconductor element, and in particular a method for manufacturing a thin semiconductor device, in which the thickness of the semiconductor element is 200 &mu;m or less. SOLUTION: In the method for manufacturing a semiconductor device, after first resin is formed on a front surface of a semiconductor wafer and second resin is formed on a rear surface thereof, and when the thickness of the first resin is A and the thickness of the second resin is B, a step of polishing the second resin is provided so as to satisfy 0.2<=B/A<=1.
申请公布号 JP2002016092(A) 申请公布日期 2002.01.18
申请号 JP20010158773 申请日期 2001.05.28
申请人 OKI ELECTRIC IND CO LTD 发明人 OOUCHI NOBUHITO;TANAKA YASUO
分类号 H01L23/29;H01L21/56;H01L23/12;H01L23/31 主分类号 H01L23/29
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