发明名称 Method of formation of a blazed grating
摘要 A method of forming a blazed grating in a surface of a body comprising the steps of forming a patterned layer having a grating therein overlying the surface of the body, non-uniformly coating the surface of the grating with a masking layer and exposing the non-uniformly coated surface to a material removal means which preferentially removes the patterned layer where it is uncoated and the surface of the body producing an asymmetric groove pattern in the surface of the body.
申请公布号 US4359373(A) 申请公布日期 1982.11.16
申请号 US19810273324 申请日期 1981.06.15
申请人 RCA CORPORATION 发明人 HAMMER, JACOB M.
分类号 G02B5/18;G03F7/00;(IPC1-7):C23C15/00 主分类号 G02B5/18
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