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发明名称
摘要
申请公布号	JP3304317(B2)	申请公布日期	2002.07.22
申请号	JP19990215005	申请日期	1999.07.29
申请人		发明人
分类号	H01L27/06;G11C11/407;H01L21/8234;H01L21/8242;H01L27/088;H01L27/10;H01L27/105;H01L27/108;(IPC1-7):H01L21/824;H01L21/823	主分类号	H01L27/06
代理机构		代理人
主权项
地址

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