| 摘要 |
<p>PURPOSE: To facilitate arranging work steps as the type of semiconductor pellet changes. CONSTITUTION: A thrust-up device comprises a suction holder 14, having a built-in thrust-up pin with a freedom of up and down, which is connected to a vacuum source so that its interior can be set at negative pressure, and a suction tube 15, which is capped on top of this suction holder in a relatively rotatable manner, and in which a plurality of suction holes 23 according to the kind of semiconductor pellet are formed. On top of the suction holder, suction holes are opened and closed by the relative rotation of the suction tube according to the kind of the semiconductor pellet, and a notch 25, which connects or shuts these suction holes to the inside of the suction holder, is provided.</p> |
