| 摘要 |
PURPOSE:To perform a high-speed and stabilized bonding work by a method wherein the height of bonding face is detected before performing a bonding work, and a bonding tool is controlled based on the detected height. CONSTITUTION:A height detector 6 is installed on an XY-table 8 in synchronization with a bonding tool 7 in such a manner that it will indicate the same point repeatedly on a pellet, the detector 6 performs both bonding work and the detection of the height of the pellet and the outer lead which will be performed before bonding. The detected height is memorized at a bonding control section 11 for each bonding, and it is read out when a bonding is performed at the next stage. At the control section 11, based on the bonding face height and the speed profile which was determined in advance, a motor 12 is controlled by the output from a position detector 9 and a speed detector 10, and the tool 7 is moved. |
