| 摘要 |
PURPOSE:To prevent the vibration of elements or temperature changes, by joining a cooling head to a heat radiating base via a cushion plate material with the heat radiating base fixed on a fixture other than a freezer. CONSTITUTION:To prevent the vibration of the heat radiating base 3 accompanied by the vibration of the cooling head 2, the cooling head 2 and the heat radiating base 3 are joined each other via the cushion plate material 7 constituted of a thermal conductor having bendability. This cushion plate material 7 is constituted of a metal plate with good thermal conductivity or copper wires, etc. joined to a plate. Besides, the heat radiating base 3 is fixed on the fixture 9 without external vibration by a support rod 8 constituted of substance with poor thermal conductivity through a bellows 5a formed on a vacuum vessel 5. Thus, the vibration of the cooling head 2 or small temperature change is prevented from being transmitted to the heat radiating base 3 to allow the prevention of the vibration or small temperature change of the laser element 4. |
