DRY ETCHING DEVICE,申请号JP19810065925-传众专利搜索

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法人/股东/高管

发明名称	DRY ETCHING DEVICE
摘要
申请公布号	JPS57181377(A)	申请公布日期	1982.11.08
申请号	JP19810065925	申请日期	1981.04.30
申请人	TOKYO SHIBAURA DENKI KK	发明人	ARIKADO TSUNETOSHI
分类号	C23F4/00;C23F1/08	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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