| 摘要 |
PURPOSE:To make processing at manufacture easy, by forming a turntable with a plurality of discs split concentrically, and providing a plurality of sections for one disc, and sucking ducts communicated to the sections. CONSTITUTION:Elastic members 3 with different diameter are provided on the upper surface of a turntable 2 concentrically. The turntable 2 consists of an outside disc 6 and an inner side disc 7, and sucking ducts 4 are formed by making ducts to the discs 6 and 7 vertically and horizontally. The outer disc 6 has one annular sucking section formed with the elastic member and the sucking duct to the one section is formed. On the other hand, the inside disc 7 has a plurality of sucking sections formed with the elastic members 3 and the sucking ducts 4 to the sections are formed so that they are not crossed with each other. Openings of the horizontal ducts toward the circumferential direction made during the duct forming are sealed with packings 8, 9 and 10. |
