| 摘要 |
<p>PURPOSE:To enable the airtightness test of a vacuum device to be carried out during the use of the vacuum device, which is used for either a magnetic lens in an electron microscope or a vapor-deposition-source housing in a vacuum vapor-deposition device, and enable compulsory cooling to be carried out easily through a refrigerant by making the gas existing in the device to be continuous with the external atmosphere by connecting a conducting tube to the device. CONSTITUTION:An outer wall (W) of the device provides a space for vacuuming the device. An aritight case 3 encircles a magnetic-lens coil 1 and a magnetic- lens york 2. The case 3 is made of a non-magnetic material such as a stainless steel, and is connected to a conducting tube 4, which leads outside the device, by welding. Owing to the above constitution, the airtightness of the device can be tested easily at any time even after the completion of the device. Besides, there is no such danger that the case 3 is broken due to the phenomenon that gas penetrating into the case 3 through a slow leak is expanded by heat generated by the used of the device. In addition, some degree of cooling effect can be achieved through compulsory or natural airing.</p> |
