PUMP DEVICE AND PUMP UNIT THEREOF

摘要

A pump device and a pump unit of the pump device. The pump device comprises a low temperature flat plate group (low temperature part) (C) having a plurality of flat plates (5) as low temperature objects arranged parallel with each other at specified intervals in a direction crossing a flow passage (4) for a gas, a high temperature flat plate group (high temperature part) (H) having a plurality of flat plates (6) as high temperature objects arranged parallel with each other at specified intervals in a direction crossing the flow passage (4), and a temperature operating means operating the temperature of at least one of these flat plate groups so that a temperature difference occurs between these flat plate groups. The flat plates (5) and (6) are displaced from each other in the flow direction of the flow passage (4), and a heat insulating layer is interposed between the flat plates (5) and (6).