发明名称 |
METHOD FOR FABRICATION OF SILICON-BASED CERAMIC NANOWIRES USING THERMAL REACTION OF SILICA POWDERS |
摘要 |
A method for fabrication of silicon-based ceramic nanowires is provided to reduce time required for mixing raw materials and to solve a cost problem according to use of catalytic materials such as expensive nanocarbons or iron, gallium, etc. by excluding use of carbon nanoparticles, carbon nanotubes, silica gel, silica xerogel, iron, gallium, etc. in a conventional silicon nitride nanowire manufacturing process and simplifying the manufacturing process. The method for fabrication of silicon-based ceramic nanowires using thermal reaction of silica powder comprises the steps of: reducing silica powder to produce silicon oxide; and subjecting the reduced silicon oxide to nitriding heat treatment at a temperature of 1200 to 1500 deg.C in a nitrogen-containing gas atmosphere for one hour to produce silicon nitride nanowires. The method further comprises the step of additionally heat-treating the silicon nitride nanowires in an atmosphere of air, steam, or argon and helium gases containing air or steam to form silicon nitride nanowires in which silica balls are regularly arranged. The additional heat treatment is performed at a temperature of 100-200 deg.C in an air atmosphere for one hour. The silica powder reducing step is performed by ball-milling silica powder and a carbon or graphite powder as a reducing agent using ceramic balls or metal balls. |
申请公布号 |
KR20070013451(A) |
申请公布日期 |
2007.01.31 |
申请号 |
KR20050067768 |
申请日期 |
2005.07.26 |
申请人 |
KOREA SEMICONDUCTOR MATERIAL CO., LTD.;KOREA ATOMIC ENERGY RESEARCH INSTITUTE |
发明人 |
RYU, HO JIN;JUNG, IN HA;SONG, KEE CHAN;JUNG, SANG OK;YANG, SHI YOUNG |
分类号 |
C01B33/113;C01B33/12;C01B33/20 |
主分类号 |
C01B33/113 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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