CLEANING COMPOSITION FOR A PROBE CARD AND METHOD OF CLEANING A PROBE CARD USING THE CLEANING COMPOSITION

摘要

Provided are a cleaning composition for a probe card, and a method for cleaning a probe card by using the composition to remove the impurities such as aluminum, aluminum oxide or an organic material without the damage to a probe card. The cleaning composition comprises 0.01-10 wt% of a basic compound; 0.1-5 wt% of an alcoholic compound; and the balance of water. Preferably the basic compound comprises at least one selected from the group consisting of an alkali hydroxide, ammonium hydroxide and a tetraalkylammonium hydroxide, and the alcoholic compound comprises at least one selected from the group consisting of a C1-C4 monoalcohol, a C1-C4 diol and a C1-C6 aminoalcohol. Also the cleaning composition comprises 0.01-10 wt% of a basic compound; 0.1-5 wt% of an alcoholic compound; 0.001-0.1 wt% of a surfactant, and the balance of water.