| 摘要 |
PURPOSE:To form a coating free from specks (fine spots formed by uneven vapor deposition) with high work efficiency by coating an optical instrument for a high-output laser with titanium monoxide as a vapor depositing source material by high frequency ion plating. CONSTITUTION:By a high frequency ion plating method using titanium monoxide (TiO) as a vapor depositing source material, a vapor deposited film[formed as a titanium dioxide (TiO)2 film by oxidation]is formed on an optical instrument for a high-output laser to form a coating oxidized sufficiently even under a low partial pressure of oxygen, contg. no lower oxide, and having superior laser resistance and physical strength. |
