发明名称 SOLID-STATE IMAGING DEVICE
摘要 <p>SOLID-STATE IMAGING DEVICE The invention relates to a solid-state imaging device having a plurality of photoelectric portions and a semiconductor substrate which includes scanning means for selecting the photosensitive portions in succession, the photoelectric portions including a layer of a photosensitive material overlying the semiconductor substrate and a transparent conductive film overlying the photoelectric material layer. The invention is characterized in that the photosensitive material of the solid-state imaging device is an amorphous material whose indispensable constituent is silicon and which contains hydrogen. The hydrogen content of the photosensitive material is preferably 5 atomic-% to 30 atomic-%, and especially 10 atomic-% to 25 atomic-%. Such an imaging device avoids the use of an electron beam and avoids many of the disadvantages of known solid-state imaging devices.</p>
申请公布号 CA1134932(A) 申请公布日期 1982.11.02
申请号 CA19790333976 申请日期 1979.08.17
申请人 HITACHI, LTD. 发明人 TSUKADA, TOSHIHISA;MARUYAMA, EIICHI;BAJI, TORU;ATAKA, SABURO;IMAMURA, YOSHINORI;SASANO, AKIRA;KUBO, MASAHARU;KOIKE, NORIO;NAGAHARA, SHUSAKU
分类号 H01L27/146;(IPC1-7):04N3/14 主分类号 H01L27/146
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