| 摘要 |
PURPOSE:To observe a minor defect easily and with high sensitivity even if it has a surface whose surface exponent is different, by irradiating a specular surface to be inspected, by plural parallel luminous fluxes having different irradiating angles. CONSTITUTION:A light from a light source provided in a lower casing 11 is converted to a parallel luminous flux through a Fresnel lens 13, is made incident to plane mirrors 19, 20 placed in 2 steps so as to surround a sample base 14 from 4 directions, on the inside wall surface of an upper casing 17, and illuminates a specular surface body 15 to be inspected, so as to satisfy the dark field condition. The reflected rays are observed directly through an observation window 16 or through a TV camera. In this way, a defect is observed by illuminating it by 8 kinds of paralllel luminous fluxes having each different direction and a low incident angle, therefore, a defect having a surface whose surface exponent is different is observed easily and with high sensitivity, as well. |
