发明名称 AUTOMATIC DIE-MOUNTING DEVICE
摘要 PURPOSE:To make an equipment smaller, simpler and more stable by a method wherein the specified position of a pellet and the good or the inferior marks are detected automatically by required number of pairs of photo-sensors which can emit and detect the light. CONSTITUTION:Photo-sensors 21, 22, 23 and 24 are positioned in such a manner that the photo-sensors 21 and 22 can detect the discrepancy of the X-direction and the photo-sensors 23 and 24 can detect the discrepancy of the Y-direction. The positions of detection by the sensors 21 and 22 are A and B which are on the X-axis of the pellet 11 and a little bit inside of the edges of the pellet 11. The positions of detection by the sensors 23 and 24 are C and D which are on the Y-axis of the pellet 11 and a little bit insie of the edges of the pellet 11. Then photo-sensors 12 and 13 which judge wether the pellet 11 is good or inferior and wether it should be picked up or not are provided above the pellet 11. With this constitution, the specified position of the pellet 11 and the good and the inferion marks on the pellets 11 are automatically detected.
申请公布号 JPS57178336(A) 申请公布日期 1982.11.02
申请号 JP19810065014 申请日期 1981.04.28
申请人 TOKYO SHIBAURA DENKI KK 发明人 TSUKISHIRO SHIZUO
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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