发明名称 Semiconductor device and method for fabricating the same
摘要 An insulating-gate semiconductor device has a first nitride semiconductor layer formed over a substrate and an insulating oxidation layer obtained by oxidizing a second nitride semiconductor layer formed on the first nitride semiconductor layer. A gate electrode is formed on the insulating oxidation layer.
申请公布号 US7307292(B2) 申请公布日期 2007.12.11
申请号 US20030456901 申请日期 2003.06.09
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 NISHII KATSUNORI;INOUE KAORU;MATSUNO TOSHINOBU;IKEDA YOSHITO;MASATO HIROYUKI
分类号 H01L31/0336;H01L21/335;H01L29/20;H01L29/778 主分类号 H01L31/0336
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