| 摘要 |
PURPOSE:To provide condensation and adsorption walls, with mean temperature in a range of at least two mutually different temperatures, by separately connecting the condensation and adsorption walls in a low temperature heat transmitter. CONSTITUTION:Since a condensation wall 26 and adsorption wall 27 are mounted to different locations of low temperature heat transmitter 23 at uniform temperature, temperatures of the both walls 26, 27 in their respective junction parts are equal to the low temperature heat transmitter 23, and a maximum cooling effect can be obtained in the both walls. Further the condensation wall 26 receives sensible heat, condensation heat and radiation heat of gas, while the adsorption wall 27 only receives almost adsorptive heat, and the both walls are provided with a different temperature range as mean temperature. That is, the adsorption wall 27 decreases its temperature from that of the condensation wall 26 to further improve vacuum exhaust performance. |
